The role of electron-stimulated desorption in focused electron beam induced deposition
نویسندگان
چکیده
منابع مشابه
The role of electron-stimulated desorption in focused electron beam induced deposition
We present the results of our study about the deposition rate of focused electron beam induced processing (FEBIP) as a function of the substrate temperature with the substrate being an electron-transparent amorphous carbon membrane. When W(CO)6 is used as a precursor it is observed that the growth rate is lower at higher substrate temperatures. From Arrhenius plots we calculated the activation ...
متن کاملFocused electron beam induced deposition: A perspective
BACKGROUND Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron beam. After 20 years of continuous development FEBID has reached a stage at which this technique is ...
متن کاملElectron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition
Platinum-carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top-down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of th...
متن کاملIn situ growth optimization in focused electron-beam induced deposition
We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the measured in situ rate of change of conductance as the fitness parameter for the algorithm. The e...
متن کاملCorrection: Modelling focused electron beam induced deposition beyond Langmuir adsorption
[This corrects the article DOI: 10.3762/bjnano.8.214.].
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2013
ISSN: 2190-4286
DOI: 10.3762/bjnano.4.56